The MA-110365 Alignment System is optimized for highest throughput and most accurate print gap settings.The equipment enables researches to create micrometer patterns in different substrates in many projects which needs to align micro structure layers together. The tool supports a variety of standard lithography processes, such as vacuum and contact exposure mode. It accommodates wafers and substrates up to 4 inches, varying in size, shape and thickness. The system contains uniform lighting system with UV100 source which leads to highly accurate alignment with high resolution prints down to 2 μm. With these features MA-110365 targets applications in MEMS, Compound Semiconductor, Power Devices and Nanotechnology.

Table of Specification 

Mask aligner models FEATURES
MA-110365 MA-210405
1-2-3-4 inch 1-2-3-4 inch Sample size (inch)
1-2-4 1-2-4 Mask size (inch)

(Three mask holders)

350–380nm 350–380nm wavelength Exposure System
UV100 UV100 power
4 inch 4 inch Beam size
Auto Semi Auto Exposing process
2µm 2µm Minimum Feature size (Positive Tone Resist)
Top-side (TSA) Top-side (TSA) Alignment methods
3µm XY- alignment stage resolution
7.5± X Alignment  range (mm)
7.5± Y
10 Z
10 deg± Ѳ
100*80 Optical Scanning movement

XY(mm*mm)

80*110 Full field

XY(mm*mm)

TSA microscope stage (joystick)
Loop Lens
1-5 mm/s scanning  speed (Joystick
100*100 Maximum Mask size ( mm×mm)

Note: for other sizes please contact us.

0.9-2 cm Optical Working distances
0.5-1-3-4 inch Vacuum chunk for samples
Vacuum, Pneumatic-auto Vacuum, Pneumatic Mask and sample holding mechanism
Damping base Anti-vibration platform
software, Controls, CD, Windows®(for Double side aligner models) PC and software

Use and Maintenance

Lithography must be done in cleanroom.

When placing the specimen or mask inside the device, be sure to use gloves and prevent any dirt inside the compartment.

Before exposure, make sure the vacuum pump is switched on and the sample is kept on the holder.

Safety and Packing

During exposure, be sure to wear UV-protective glasses and do not stare at all.

When working, keep your hair, hands and clothes away from mechanical parts.

Do not wet the instrument’s electrical parts.

Avoid moving the device when the lamp is still hot.