The new MAB Model 110365 front and backside mask aligner system offers advanced features and specifications found most often in costly automated production mask aligners. With the development of this new mask aligner, AMS meets the growing challenge of a dynamic semiconductor and MEMS market.

The system contains uniform lighting system with UV100 source  and  high resolution top and bottom side split field  microscopes which lead to highly fast and highly accurate double side alignment  with high resolution feature size down to 2 μm.

Table of Specification 

Mask aligner models FEATURES
MAB-110365 MAB-210405
1-2-3-4 inch 1-2-3-4 inch Sample size (inch)
1-2-4 1-2-4 Mask size (inch)

(Three mask holders)

350–380nm 350–380nm wavelength Exposure System
UV100 UV100 power
4 inch 4 inch Beam size
Auto Semi Auto Exposing process
2µm 2µm Minimum Feature size (Positive Tone Resist)
Top-side (TSA)

Back-side(BSA)

Top-side (TSA)

Back-side(BSA)

Alignment methods
20µm 20µm Back side- alignment stage resolution
3µm XY- alignment stage resolution
7.5± X Alignment  range (mm)
7.5± Y
10 Z
10 deg± Ѳ
100*80 Optical Scanning movement

XY(mm*mm)

80*110 Full field

XY(mm*mm)

TSA microscope stage (joystick)
Loop Lens
1-5 mm/s scanning  speed (Joystick
5*50 Full field

XY(mm*mm)

BSA microscope stage

(micrometer)

40X Max Magn.
100*100 Maximum Mask size ( mm×mm)

Note: for other sizes please contact us.

0.9-2 cm Optical Working distances
0.5-1-3-4 inch Vacuum chunk for samples
Vacuum, Pneumatic-auto Vacuum, Pneumatic Mask and sample holding mechanism
Damping base Anti-vibration platform
software, Controls, CD, Windows®(for Double side aligner models) PC and software

Use and Maintenance

Lithography must be done in cleanroom.

When placing the specimen or mask inside the device, be sure to use gloves and prevent any dirt inside the compartment.

Before exposure, make sure the vacuum pump is switched on and the sample is kept on the holder.

Safety and Packing

During exposure, be sure to wear UV-protective glasses and do not stare at all.

When working, keep your hair, hands and clothes away from mechanical parts.

Do not wet the instrument’s electrical parts.

Avoid moving the device when the lamp is still hot.