Coating Process Unit

An other important advancements by AMS Group in the lithography space include the company’s special Coating Process Unit. This system not only integrates coating and baking platform but, ultimately,  accommodate the processing of an extensive range of materials such as positive and negative resists, coating of thin resist layers and high viscosity resists. Conformal layers of photoresist or polymers are achieved on wafers  with AMS’s advanced coating technology. This ensures…

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